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Atomic ejection in the beam sputtering of nickel, by argon ions, in the threshold to 600 ev energy range

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Title Atomic ejection in the beam sputtering of nickel, by argon ions, in the threshold to 600 ev energy range
Names Cuderman, Jerry Ferdinand (creator)
Brady, James J. (advisor)
Date Issued 1965-09-02 (iso8601)
Note Graduation date: 1966
Abstract Using a low-energy, three stage, differentially pumped ion
accelerator, similar to that used by Hagstrom for Auger electron
ejection studies, permits, with the application of radiotracer methods,
a new approach to the study of low energy sputtering.
The experimental approach consisted of pumping down the
experimental tube to 10⁻⁹ torr, outgassing the target by electron
bombardment, introducing argon into the system, and bombarding a
Ni⁶³ target for a time which is short compared to the time required
for a monolayer of adsorbed gases to form at the existing residual
partial pressure of adsorbable gases.
The target consisted of Ni⁶³ plated on a cold-rolled nickel
substrate. Heating the target above its recrystallization temperature
produced an 80 percent oriented polycrystalline surface which approximated
the (100) plane of a nickel single crystal. Mounting the target so that its surface normal made an angle of 30⁰ with respect
to the incident beam direction and bombarding with argon ions produced
the characteristic pattern for atoms sputtered from the close-packed directions or "chains" which terminate on the surface of a
(100) plane.
The target was mounted inside a cylindrical collector, slightly
behind center. The ion beam impinged on the target through a narrow
slit in the collector. Sputtered atoms were collected on a removable
molybdenum foil which lined the outer collector cylinder support.
After each bombardment, the molybdenum foil was removed, cut into
narrow strips, and then the strips were analyzed by placing them
under a G-M counter.
The tracer technique permitted measuring the relative sputtering
yields from individual crystallographic directions with respect to
the angle of incidence of the ion beam. The method thus permitted a
direct check on the Harrison-Magnuson theory of single-crystal
sputtering thresholds. Contrary to their predictions, there was very
little dependence of the threshold on angle of ion incidence with
respect to a given chain direction. The observed sputtering yield
curves flattened out or "saturated" at a much lower energy than
those appearing in the literature. The saturation yield proved highly
dependent on the angle of ion incidence. It appears, on the basis of
the single direction yield curves, that the measurements appearing in the literature represent a superposition of independent yield
curves--from <110> and from <100> directions, respectively.
Reflection maxima of sputtered nickel atoms, which appeared
behind the target on the collector surface, appear to be due to
specular reflection from the primary maxima. A plot of the reflection
ratios as a function of incident ion energy suggests that the
specular reflection arises from resonance scattering from the interaction
potential that the nickel atoms encounter at the molybdenum
surface.
Genre Thesis/Dissertation
Topic Nickel
Identifier http://hdl.handle.net/1957/48001

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